Semiconductor

Keeping Critical Processes Cool and Contaminant-Free

Exergy designs its heat exchangers to meet semiconductor fabrication’s rigorous thermal and contamination control standards. We engineer our solutions for maximum efficiency, minimal downtime, and seamless integration into semiconductor process tools.

Applications

Etching & Deposition (CVD, ALD, PECVD, PVD) – Precise cooling ensures uniform layer formation and defect-free thin films.
Photolithography & Photoresist Processing – Thermal consistency prevents pattern distortion and ensures high-resolution features.
Wet Cleaning & Ultra-Pure Water (UPW) Systems – Maintains fluid temperatures for particle-free wafer surfaces.
CMP (Chemical Mechanical Planarization) Slurry Cooling – Prevents agglomeration, ensuring smooth wafer planarization.
Vacuum & Process Chamber Cooling – Removes excess heat, improving process chamber stability and tool performance.
DI Water & Chemical Loop Cooling – Ensures optimal chemical recirculation and purification temperature control.

Features

Unrivaled Temperature Stability – Delivers thermal accuracy, preventing fluctuations that can disrupt production.
Compact, Cleanroom-Optimized Design – Saves valuable fab space while delivering superior thermal performance.
Extended Service Life & Minimal Maintenance – Engineered for durability, reliability, and continuous uptime.
Custom Solutions for Specific Semiconductor Processes – Optimized for wafer cleaning, deposition, etching, CMP, and DI water loops.
Lightweight & Modular – Enables quick integration into semiconductor tools.
Minimal Maintenance – Reduces downtime and increases manufacturing efficiency.

Product Strengths

±0.1°F Thermal Stability – Essential for etching, deposition, and CMP yield consistency.
Designed for UPW & Chemicals – Prevents contamination in etching and wafer cleaning.
PFAS-Free Components – Exergy heat exchangers contain no PFAS materials, ensuring compliance with evolving environmental regulations and semiconductor purity requirements.
ISO, SEMI & Cleanroom Compliant– Meeting the highest semiconductor industry standards.
Exergy Engineering Team – Providing design, integration, and optimization support.
Rapid Prototyping & Fabrication – Ensuring quick delivery for new expansions.

Keeping Critical Processes Cool and Contaminant-Free

Applications

Features

Product Strengths

Case Study Examples

Major Customers